Linear Transfer Wet Benches


		*World Class Wet Processing and Clean Room Equipment*

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Linear Transfer Wet Benches

Acid Etch System Each load consists of two cassettes of 4, 5, 6 or 8" wafers		*Automated Linear Transfer Acid Processing Station* The Acid Processing Station pictured will simultaneously process multiple loads of silicon wafers through selected heated or ambient temperature chemical baths and rinse tanks. This bench is designed to be used with aqueous chemical processes, which may include Buffered Oxide Etch, Common Oxide Etch, Nitride Etch, or other processes which utilize strong Acid or Alkaline Solutions.
	*Linear motion is smooth and reliable*	Programmable Recipes allow Process Versatility

	Turntable load and unload stations
	Fully automatic, dual axis closed loop servo transfer hoist maintains extremely accurate position and speed control
	Programmable Logic Controller allows multiple processes and recipes to be available
	Maintains close control of the entire bench process
	Completely programmable cycle time is process dependent
	Touch screen overlay is the main operator interface, and is used for programming all hoist positions and speed variables

	Collects and stores data for processing history, or Statistical Process Control
	Critical hoist/carrier positions may also be programmed using a “teach pendant” for proper interfacing
	All bench alarms are indicated by a visual light tree and an audible alarm, with identification on the operator panel
	Fire protection is provided by an agent release fire control system, with a fire damper
	Tool secured electrical or pneumatic access panels
	Process area access doors are electrically interlocked for hoist safety

	A lockout valve is provided for facility air, nitrogen or bulk-fill chemical inlets
	A central control console houses controls for pneumatics, hoist servo drives, tank heat relays, circuit breakers, and all required wiring connections
	A sampling valve is provided for checking DI water specifications
	Deck design is sectional, with electrical quick-disconnects, lip exhaust and drop-in tanks. All facility connections are located at the rear of the bench for easy access
	Chiller units may be remotely located up to 25 feet away

FM4910-Approved CPVC materials are available for bench construction

Linear Transfer Solvent Station

Solvent

Stripping Stations are also

available with Linear Transfer Systems

Go to PDF format Catalog Sheet: Linear Transfer Bench Catalog Sheet